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1

Stability of wafer level vacuum encapsulated single-crystal silicon resonators

Ville Kaajakari, Jyrki Kiihamäki, Aarne Oja, Sami Pietikäinen, Ville Kokkala, Heikki Kuisma

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 486 KB

english, 2006

2

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining and Microfabrication Process Technology VI - Loading effects in deep silicon etching

Karttunen, Jani, Kiihamaki, Jyrki, Franssila, Sami, Karam, Jean Michel, Yasaitis, John A.

Year:

2000

Language:

english

File:

PDF, 257 KB

english, 2000

3

Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

R.L. Puurunen, A. Häärä, H. Saloniemi, J. Dekker, M. Kainlauri, H. Pohjonen, T. Suni, J. Kiihamäki, E. Santala, M. Leskelä, H. Kattelus

Journal:

Sensors and Actuators A: Physical

Year:

2012

Language:

english

File:

PDF, 692 KB

english, 2012

4

“Plug-up”—a new concept for fabricating SOI MEMS devices

J. Kiihamäki, J. Dekker, P. Pekko, H. Kattelus, T. Sillanpää, T. Mattila

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 940 KB

english, 2004

5

14 MHz micromechanical oscillator

T. Mattila, O. Jaakkola, J. Kiihamäki, J. Karttunen, T. Lamminmäki, P. Rantakari, A. Oja, H. Seppä, H. Kattelus, I. Tittonen

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 158 KB

english, 2002

6

A 12 MHz micromechanical bulk acoustic mode oscillator

T. Mattila, J. Kiihamäki, T. Lamminmäki, O. Jaakkola, P. Rantakari, A. Oja, H. Seppä, H. Kattelus, I. Tittonen

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 260 KB

english, 2002

7

Long-term stability of single-crystal silicon microresonators

M. Koskenvuori, T. Mattila, A. Häärä, J. Kiihamäki, I. Tittonen, A. Oja, H. Seppä

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 318 KB

english, 2004

8

The Kirk effect in the LIGBT devices

Eranen, S., Gronlund, M.M., Blomberg, M., Kiihamaki, J.

Journal:

IEEE Transactions on Electron Devices

Year:

1991

Language:

english

File:

PDF, 569 KB

english, 1991

9

[IEEE 2000 IEEE MTT-S International Microwave Symposium Digest - Boston, MA, USA (11-16 June 2000)] 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017) - Large-displacement modelling and simulation of micromechanical electrostatically driven resonators using the harmonic balance method

Veijola, T., Mattila, T., Jaakkola, O., Kiihamaki, J., Lamminmaki, T., Oja, A., Ruokonen, K., Seppa, H., Seppala, P., Tittonen, I.

Year:

2000

Language:

english

File:

PDF, 373 KB

english, 2000

10

[IEEE 2019 IMAPS Nordic Conference on Microelectronics Packaging (NordPac) - Copenhagen, Denmark (2019.6.11-2019.6.13)] 2019 IMAPS Nordic Conference on Microelectronics Packaging (NordPac) - Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS Mirror

Ailas, Henri, Saarilahti, Jaakko, Pensala, Tuomas, Kiihamaki, Jyrki

Year:

2019

Language:

english

File:

PDF, 725 KB

english, 2019

11

Depth and profile control in plasma etched MEMS structures

J. Kiihamäki, H. Kattelus, J. Karttunen, S. Franssila

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.68 MB

english, 2000

12

“Plug-up”–a new concept for fabricating SOI MEMS devices

J. Kiihamäki, J. Dekker, P. Pekko, H. Kattelus, T. Sillanpää, T. Mattila

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 320 KB

english, 2004

13

Etching through silicon wafer in inductively coupled plasma

S. Franssila, J. Kiihamäki, J. Karttunen

Journal:

Microsystem Technologies

Year:

2000

Language:

english

File:

PDF, 395 KB

english, 2000

14

[IEEE 2019 IEEE International Ultrasonics Symposium (IUS) - Glasgow, United Kingdom (2019.10.6-2019.10.9)] 2019 IEEE International Ultrasonics Symposium (IUS) - Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Pensala, Tuomas, Kiihamaki, Jyrki, Kyynarainen, Jukka, Dekker, James, Gorelick, Sergey, Pekko, Panu, Pernu, Tapio, Ylivaara, Oili, Gao, Feng, Morits, Dmitry

Year:

2019

File:

PDF, 436 KB

2019

15

HV NMOS Transistor for IC/MEMS Integration on SOI

Jansson, Roope, Ronkainen, Hannu, Kiihamäki, Jyrki, Mellin, Joni

Journal:

Physica Scripta

Year:

2004

Language:

english

File:

PDF, 154 KB

english, 2004

16

[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Modular integration of CMOS and SOI-MEMS using "plug-up" concept

Kiihamaki, J., Ronkainen, H., Pekko, P., Kattelus, H., Theqvist, K.

Year:

2003

Language:

english

File:

PDF, 248 KB

english, 2003

17

[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Reducing stiction in Microelectromechanical Systems by nanometer-scale films grown by atomic layer deposition

Puurunen, R.L., Haara, A., Ritala, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamaki, J., Santala, E., Leskela, M., Kattelus, H.

Year:

2011

Language:

english

File:

PDF, 1.09 MB

english, 2011

18

Electrical and Mechanical Properties of Micromachined Vacuum Cavities

Kiihamäki, J, Ronkainen, H, Häärä, A, Mattila, T

Journal:

Physica Scripta

Year:

2004

Language:

english

File:

PDF, 253 KB

english, 2004

19

[IEEE IEEE Ultrasonics Symposium, 2005. - Rotterdam, The Netherlands (18-21 Sept. 2005)] IEEE Ultrasonics Symposium, 2005. - Low noise silicon micromechanical bulk acoustic wave oscillator

Kaajakari, V., Rantakari, P., Koskinen, J.K., Mattila, T., Kiihamaki, J., Koskenvuori, M., Tittonen, I., Oja, A.

Year:

2005

Language:

english

File:

PDF, 526 KB

english, 2005

20

[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Square-extensional mode single-crystal silicon micromechanical RF-resonator

Kaajakari, V., Mattila, T., Oja, A., Kiihamaki, J., Kattelus, H., Koskenvuori, M., Rantakari, P., Tittonen, I., Seppa, H.

Year:

2003

Language:

english

File:

PDF, 293 KB

english, 2003

21

Outgassing of Water Molecules During Silicon Fusion Bonding

Feng Gao, Ari Hokkanen, Panu Pekko, Anu Kärkkäinen, Jyrki Kiihamäki

Journal:

Physics Procedia

Year:

2012

Language:

english

File:

PDF, 1.12 MB

english, 2012

22

Studies on aluminium corrosion during and after HF vapour treatment

Heini Ritala, Jyrki Kiihamäki, Mikko Heikkilä

Journal:

Microelectronic Engineering

Year:

2010

Language:

english

File:

PDF, 592 KB

english, 2010

23

Microelectromechanical delay lines with slow signal propagation

Alastalo, Ari T, Kiihamäki, Jyrki, Seppä, Heikki

Journal:

Journal of Micromechanics and Microengineering

Year:

2006

Language:

english

File:

PDF, 706 KB

english, 2006

24

Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator for Low-Phase-Noise Oscillator Applications

Kaajakari, V., Mattila, T., Oja, A., Kiihamaki, J., Seppa, H.

Journal:

IEEE Electron Device Letters

Year:

2004

Language:

english

File:

PDF, 152 KB

english, 2004

25

[IEEE ESSCIRC 2004 - 29th European Solid-State Circuits Conference - Estoril, Portugal (16-18 Sept. 2003)] ESSCIRC 2004 - 29th European Solid-State Circuits Conference (IEEE Cat. No.03EX705) - Monolithic SOI-MEMS capacitive pressure sensor with standard bulk CMOS readout circuit

Ylimaula, M., Aberg, M., Kiihamaki, J., Ronkainen, H.

Year:

2003

Language:

english

File:

PDF, 257 KB

english, 2003

26

[IEEE ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures - Kobe, Japan (19-22 March 2001)] ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures (Cat. No.01CH37153) - Use of electrical test structures to characterize trench profiles etched on SOI wafers

Guillaume, N., Kiihamaki, J., Karttunen, J., Kattelus, H.

Year:

2001

Language:

english

File:

PDF, 510 KB

english, 2001

27

[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Stability of wafer level vacuum encapsulated single-crystal silicon resonators

Kaajakari, V., Kiihamaki, J., Oja, A., Sepp, H., Pietikainen, S., Kokkala, V., Kuisma, H.

Year:

2005

Language:

english

File:

PDF, 728 KB

english, 2005

28

[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - "PLUG-UP" - a new concept for fabricating SOI MEMS devices

Kiihamaki, J., Pekko, P., Kattelus, H., Sillanpaa, T., Mattila, T.

Year:

2003

Language:

english

File:

PDF, 358 KB

english, 2003

29

[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Low noise, low power micromechanical oscillator

Rantakari, P., Kaajakari, V., Mattila, T., Kiihamaki, J., Oja, A., Tittonen, I., Seppa, H.

Year:

2005

Language:

english

File:

PDF, 688 KB

english, 2005

30

[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Fabrication of single crystal silicon resonators with narrow gaps

Kiihamaki, J., Kaajakari, V., Luoto, H., Kattelus, H., Yli-Koski, M.

Year:

2005

Language:

english

File:

PDF, 613 KB

english, 2005

31

[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Nonlinearities in single-crystal silicon micromechanical resonators

Kaajakari, V., Mattila, T., Kiihamaki, J., Kattelus, H., Oja, A., Seppa, H.

Year:

2003

Language:

english

File:

PDF, 317 KB

english, 2003

32

[IEEE 2002 IEEE International Ultrasonics Symposium - Munich, Germany (8-11 Oct. 2002)] 2002 IEEE Ultrasonics Symposium, 2002. Proceedings. - Micromechanical bulk acoustic wave resonator

Mattila, T., Oja, A., Seppa, H., Jaakkola, O., Kiihamaki, J., Kattelus, H., Koskenvuori, M., Rantakari, P., Tittonen, I.

Year:

2002

Language:

english

File:

PDF, 150 KB

english, 2002

33

SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS - Paris, France (Tuesday 9 May 2000)] Design, Test, Integration, and Packaging of MEMS/MOEMS - Micromechanical silicon precision scale

Oja, Aarne S., Sillanpaa, Teuvo, Seppae, H., Kiihamaki, Jyrki, Seppala, P., Karttunen, Jani, Riski, Kari, Courtois, Bernard, Crary, Selden B., Gabriel, Kaigham J., Karam, Jean Michel, Markus, Karen W.

Year:

2000

Language:

english

File:

PDF, 825 KB

english, 2000

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